Chitofu chekupisira vacuum chinoshandiswa zvakanyanya pakuita kwekupisira zvinhu zve semiconductor nemidziyo yekugadzirisa simba. Chinogona kushandiswa pakuita zvekupisira vacuum, kuita zvekupisira gasi uye kuita zvekupisira zvechinyakare. Ichi chishandiso chitsva chekugadzira chiri mu semiconductor special equipment series. Chine dhizaini itsva, mashandiro ari nyore uye chimiro chakamanikana. Chinogona kupedzisa ma process flow akawanda pamudziyo mumwe chete. Chinogona zvakare kushandiswa pakurapa kupisa kwe vacuum, kushandisa vacuum brazing nedzimwe nzira mune dzimwe nzvimbo.
Unyanzvi hunodiwa pakushandisa chitofu chekupisa vacuum
Chitofu chinopisa chevacuum chakagadzirwa kuti chigadzire kupisa kwakanyanya mu tungsten crucible iri mu coil nekushandisa musimboti wekupisa kwepakati nepakati pasi pekuchengetedzwa kwehydrogen inozadzwa mushure mekupukuta, uye kuita kuti chishande kuburikidza nemwaranzi inopisa. Zvakakodzera kutsvagurudza kwesainzi uye maindasitiri emauto kugadzira nekunyorovesa hupfu hwe alloys dzinoramba kushanda dzakadai se tungsten, molybdenum uye alloys dzadzo. Nzvimbo inoiswa chitofu chemagetsi inofanira kusangana nezvinodiwa zve vacuum sanitation. Mhepo yakakomberedza inofanira kunge yakachena uye yakaoma, ine mamiriro ekunze akanaka. Nzvimbo yebasa haisi nyore kukwidza guruva, nezvimwewo.
Unyanzvi hwekushandisa zuva nezuva hwechoto chekupisa vacuum:
1. Tarisa kana zvikamu zvese nezvishongedzo zviri mukabati yekudzora zvakakwana uye zvisina kukanganiswa.
2. Kabhineti yekudzora inofanira kuiswa pahwaro hwakakodzera uye inofanira kugadziriswa.
3. Zvichienderana nedhayagiramu yekubatanidza waya, uye tichitarisa dhayagiramu yemagetsi, batanidza dunhu guru rekunze nedunhu rekudzora, uye simbisa zvakasimba kuti wiringi dzacho dzive dzakarurama.
4. Tarisa kuti chikamu chinofambiswa chemudziyo wemagetsi chinofanira kufamba zvakasununguka pasina kuvharika.
5. Kudzivirira kwekudzivirira hakufanirwe kunge kuri pasi pe2 megohms.
6. Mavharuvhu ese echoto chemagetsi chevacuum anofanira kunge akavharwa.
7. Isa switch yemagetsi ekudzora panzvimbo yekudzima.
8. Tendeudza bhatani rinodzora kumanikidzwa nemaoko uchipesana newachi.
9. Isa bhatani rekuti alarm panzvimbo yakavhurika.
10. Pedzisa kubatana kwemvura inotonhorera inotenderera yemuchina zvichienderana nehurongwa. Zvinokurudzirwa kuti mushandisi abatanidze imwe mvura yakamira (mvura yepombi) papombi huru inopinza neinoburitsa yemuchina kudzivirira rin'i yekuvharira kuti isatsve nekuda kwekutadza kushanda kwemvura inotenderera kana kuti kutadza kushanda kwemagetsi.
Nguva yekutumira: Chikumi-21-2022